The quality and stability of ultra-high purity gas are very important in semiconductor production. Therefore, the CQC system comes into being as the Times require. CQC system mainly consists of gas moisture analyzer, oxygen analyzer, particle analyzer and gas chromatography analyzer, aiming at gas moisture, oxygen, solid particles, carbon and oxygen, hydrocarbon, nitrogen, hydrogen and other impurity gas content of the measurement monitoring. At present, our company has a good cooperation with the famous international brands such as Tigeroptics/MCM moisture meter, Servomex oxygen meter, PEAK gas chromatograph, PMS/Accudevice granule meter, which are the most mainstream CQC equipment brands in the semiconductor industry
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由于超高纯气体在半导体生产过程中不可或缺,气体的品质及其稳定性变得尤为重要,因此CQC西也应运而生。
CQC系统主要由气体的水分分析仪,氧分分析仪,颗粒分析仪和气相色谱仪组成,针对气体中的水分,氧分,固体颗粒物,碳氧化合物,碳氢化合物,氮,氢等杂质气体的含量进行测量监控。