1.Fully Automatic, Continuous Processing Single-cassette Handling System.
2.PC-controlled With Familiar Windows™ Software Interface.
3.Full, On-line Process Monitoring With Dynamic Progress Diagram Display.
4.Low Cost-of-Ownership - Requires No Nitrogen, Exhaust or Cooling Utilities.
5.Safe, Ozone-free UV Irradiation Source.
6.Processes 6”, 8” and 12” Wafer Frames/Cassettes.
7.Economical Footprint 58 x 111 cm.
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